We have the advanced FEI Vectra-IET FIB upgrade, we do FIB circuit editing on most IC package types and up to 8” wafers. The FEI Vectra has a wide range of ion beam currents available from 1pA to 15nA  , and modification capability down to 28nm.

FEI Vectra-IET FIB Specification

  • Ion Column: Visionary, Ga liquid metal
  • Acc. Voltage: 5kV – 50 kV
  • Beam Current: 1.0 pA – 15.0 nA
  • Image Resolution: 5nm
  • Stage: 2-axes 8″ Laser interferometer stage
  • X, Y motion 200 mm
  • Image Rotation 360
  • End Point Detection
  • Stage current end-pointing
  • Gas assisted Etching ( Chlorine, Xenon, Water )
  • Deposition ( Tungsten )
  • Insulator deposition ( Siloxane/TMTCS, Oxygen )
  • Cooper Removal ( CoppeRX )
  • GDS Navigation